Comparison of plasma characteristics of EUV and laser ablated materials by optical emission spectroscopy and particle detection

Presentation information

Oral presentation

04. Quantum Electronics » 4.7 Laser processing

Tue. Sep 17, 2013 1:30 PM - 6:30 PM A3 (TC1 1F-132)

6:00 PM - 6:15 PM

^○Nozomi Tanaka¹, Masaya Masuda¹, Kensuke Nagatomi², Minoru Yoshida², Shinsuke Fujioka¹, Hiroaki Nishimura¹ (ILE Osaka Univ.¹, Kinki Univ.²)

Keywords:EUV,アブレーション,プラズマ加熱