[17p-A3-1~18] 4.7 Laser processing

[17p-A3-2] Growth of Nano-Pillars and Particles Irradiated with Fluence below Ablation Threshold in Femtosecond Laser Sub-Micron Machining

^○Takashi Yagi¹, Go Odachi², Ryousuke Sakamoto³, Kento Hara⁴ (Tokai Univ.¹, Showa Cable², Forum Engi.³, Jyosai J. High-School⁴)

Keywords:フェムト秒レーザー加工,固相相転移