[17p-A3-1~18] 4.7 Laser processing

[17p-A3-3] Effect of air on debris formation in femtosecond laser ablation of crystalline Silicon

^○Takashi Yagi¹, Go Odachi², Ryousuke Sakamoto³, Kento Hara⁴ (Tokai Univ.¹, Showa Cable Systems², Josai Juniro High-school³, Forum Engineering⁴)

Keywords:femtosecond laser ablation,nano particle,debris