The 74th JSAP Autumn Meeting,2013

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Oral presentation

17. Nanocarbon Technology » 17.2 Structural control and process

[17p-B1-14~21] 17.2 Structural control and process

Tue. Sep 17, 2013 4:30 PM - 6:30 PM B1 (TC2 1F-101)

4:45 PM - 5:00 PM

[17p-B1-15] Ultra Low Damage Nano Ribbon Formation of Graphene Using Neutral Beam Etching

○Takeru Okada1, Chi-Hsien Huang2, Chao-Sung Lai2, Seiji Samukawa1,3 (IFS, Tohoku Univ.1, WPI-AIMR, Tohoku Univ.2, Chang Gung Univ.3)

Keywords:中性粒子ビームエッチング,ダメージフリーグラフェン加工,グラフェンパターニング