The 74th JSAP Autumn Meeting,2013

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15. Crystal Engineering » 15.6 IV-group-based compounds

[17p-B3-1~17] 15.6 IV-group-based compounds

Tue. Sep 17, 2013 1:30 PM - 6:00 PM B3 (TC2 1F-105)

3:45 PM - 4:00 PM

[17p-B3-9] Off-Orientation Influence on C-face (0001) 4H-SiC Surface Morphology Produced by Etching using

Yusuke Fukumoto1, ○Hitoshi Habuka1, Tomohisa Kato2 (Yokohama Nat. Univ.1, AIST2)

Keywords:炭化珪素