The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[17p-B5-1~21] 13.3 Insulator technology

Tue. Sep 17, 2013 1:00 PM - 6:30 PM B5 (TC2 2F-201)

1:00 PM - 1:15 PM

[17p-B5-1] Synthesis of SrHfO3 Perovskite Thin Films on Si Substrates

○Shinji Migita1, Yukinori Morita1, Meishoku Masahara1, Hiroyuki Ota1 (AIST GNC1)

Keywords:High-k,ペロブスカイト,ハフニウム