The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[17p-B5-1~21] 13.3 Insulator technology

Tue. Sep 17, 2013 1:00 PM - 6:30 PM B5 (TC2 2F-201)

4:45 PM - 5:00 PM

[17p-B5-15] Inspection of Introduction Al2O3 Film to Decrease Leak Current

○Yohma Kuroyanagi1, Yuya Nakatani1, Yoshitaka Iwazaki1, Tomo Ueno1 (Tokyo Univ.of Agri.&Tech.1)

Keywords:Ge,Al2O3,HfO2