[17p-B5-1~21] 13.3 Insulator technology

[17p-B5-5] Reliability of La-silicate gate Capacitor with tungsten gate electrode

^○Yoshinori Nakamura¹, Shuhei Hosoda¹, Kamale Tuokedaerhan¹, Kuniyuki Kakushima², Yoshinori Kataoka², Akira Nishiyama², Hitoshi Wakabayashi², Nobuyuki Sugii², Kazuo Tsutsui², Hiroshi Iwai¹ (Tokyo Tech. FRC¹, Tokyo Tech. IGSSE²)

Keywords:High-k