The 74th JSAP Autumn Meeting,2013

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Oral presentation

08. Plasma Electronics » [INVITED Seech] Plasma Electronics

[17p-C11-1~3] [INVITED Seech] Plasma Electronics

Tue. Sep 17, 2013 1:30 PM - 2:45 PM C11 (TC3 2F-210)

2:15 PM - 2:45 PM

[17p-C11-3] [INVITED]Application of Plasma Physics for Industry

○Hiroshi Fujiyama1 (Nagasaki Univ.1)

Keywords:プラズマプロセス,プラズマ源,大面積均一