[17p-C11-5~6] Plasma Electronics Award Speech

[17p-C11-6] [Plasma Electronics Award Speech](30 min.) Real-time in-situ electron-spin-resonance analysis of plasma-surface interactions

^○Kenji Ishikawa¹, Naoya Sumi¹, Akihiko Kono², Hideo Horibe², Keigo Takeda¹, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹, Kanazawa Inst.²)

Keywords:電子スピン共鳴,プラズマ表面相互作用