The 74th JSAP Autumn Meeting,2013

Presentation information

Print

Oral presentation

03. Optics » 3.4 Optical measurement

[17p-C13-1~14] 3.4 Optical measurement

Tue. Sep 17, 2013 1:30 PM - 5:15 PM C13 (TC3 2F-214)

4:45 PM - 5:00 PM

[17p-C13-13] Precision Surface Profile Measurement using White Light Interferometry with Tilting Reference Plane

○Shigeru Matsui1, Yugo Onoda1 (Hitachi High-Tech1)

Keywords:表面形状計測,白色干渉,参照面