[17p-C13-1~14] 3.4 Optical measurement

[17p-C13-4] Ultra-High-Speed Imaging using Space-Time Conversion for Defect Detection

^○Tatsumi Hattori¹, Yuichi Shimoda¹, Haruyuki Ishii¹, Yoshihiro Saito¹, Toshiyuki Nakao², Masahiro Watanabe², Yasuhiro Yoshitake¹, Keisuke Goda³ (Hitachi High-Technologies¹, Hitachi Ltd. Yokohama Research Laboratory², Univ. of Tokyo³)

Keywords:超高速撮像,Ultra High-Speed Imaging,ファイバーレーザー