The 74th JSAP Autumn Meeting,2013

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Oral presentation

03. Optics » 3.4 Optical measurement

[17p-C13-1~14] 3.4 Optical measurement

Tue. Sep 17, 2013 1:30 PM - 5:15 PM C13 (TC3 2F-214)

3:45 PM - 4:00 PM

[17p-C13-9] Angle-Resolved Measurement of Diffraction Light with High Dynamic Range Optical Scatterometer

○(PC)Tomohiro Kiire1, Daisuke Barada1,2, Manabu Hakko3, Kazuhiko Momoki3, Yoshio Hayasaki1, Toyohiko Yatagai1 (CORE, Utsunomiya Univ.1, Grad. Sch. Eng., Utsunomiya Univ.2, Canon Inc.3)

Keywords:散乱,回折,ダイナミックレンジ