The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17p-D1-1~18] 6.2 Carbon-based thin films

Tue. Sep 17, 2013 1:30 PM - 6:45 PM D1 (MK 1F-101)

4:30 PM - 4:45 PM

[17p-D1-12] Response characteristics of the photocurrent of carbon film by microwave surface wave plasma CVD

○Susumu Ichimura1,2, Ghimire Dilip. C.1, Adhikari Sudip1, Hideo Uchida1, Koichi Wakita1, Yasuhiko Hayashi2, Masayoshi Umeno1 (Chubu Univ.1, Okayama Univ.2)

Keywords:アモルファスカーボン,マイクロ波表面波プラズマCVD,薄膜