The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17p-D1-1~18] 6.2 Carbon-based thin films

Tue. Sep 17, 2013 1:30 PM - 6:45 PM D1 (MK 1F-101)

2:00 PM - 2:15 PM

[17p-D1-3] a-CNx:H Film CVD using Band Type Supermagnetron Plasma (III)

○Haruhisa Kinoshita1, Syunsuke Yagi1 (Shizuoka Univ., Grad. Sch. Eng.1)

Keywords:スーパーマグネトロンプラズマ