[17p-D1-1~18] 6.2 Carbon-based thin films

[17p-D1-8] Thermal dependence of resistivity on diamond-like carbon film

^○Hisashi Yoshioka¹, Shigeo Ohshio¹, Keiji Komatsu¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

Keywords:ダイヤモンドライクカーボン,抵抗率,温度依存性