Development of wide band soft x-ray grating spectrographs in 50-4000 eV and their application to electron microscopes

Takashi Imazono

Presentation information

Poster presentation

07. Beam Technology and Nanofabrication » 7 Beam Technology and Nanofabrication(poster)

[17p-P1-1~8] 7 Beam Technology and Nanofabrication

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P1 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[17p-P1-1] Development of wide band soft x-ray grating spectrographs in 50-4000 eV and their application to electron microscopes

^○Takashi Imazono¹, Masato Koike¹, Tetsuya Kawachi¹, Noboru Hasegawa¹, Masaru Koeda², Tetsuya Nagano², Hiroyuki Sasai², Yuki Oue², Zeno Yonezawa², Satoshi Kuramoto², Masami Terauchi³, Hideyuki Takahashi⁴, Nobuo Handa⁴, Takanori Murano⁴ (JAEA¹, Shimadzu Corp.², Tohoku Univ.³, JEOL Ltd.⁴)

Keywords:軟Ｘ線,発光,多層膜回折格子