[17p-P1-1~8] 7 Beam Technology and Nanofabrication

[17p-P1-5] Direct EB patterning of functional oxide mask on periodical mesa-structures applied for well-ordered GaAs nano structures

^○(M1)Takahiro Ichiyama¹, Shogo Oka¹, Koji Ashida¹, Yasunori Kutsuma¹, Tadaaki Kaneko¹ (Kwansei Gakuin Univ.¹)

Keywords:電子線リソグラフィー,有機レジストフリー,熱エッチング