The 74th JSAP Autumn Meeting,2013

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Poster presentation

07. Beam Technology and Nanofabrication » 7 Beam Technology and Nanofabrication(poster)

[17p-P1-1~8] 7 Beam Technology and Nanofabrication

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P1 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[17p-P1-8] XPS analysis on damage of Si surface induced by argon gas cluster ion beam irradiation

○Ako Miisho1, Shin Takahashi1, Masayuki Inaba1, Koji Honda2, Syugo Miyake1 (Kobelco Research Institute, Inc.1, Hyogo Prefectural Institute of Technology2)

Keywords:XPS,GCIB,Si