The 74th JSAP Autumn Meeting,2013

Presentation information

Poster presentation

16. Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[17p-P12-1~8] 16.3 Bulk, thin-film and other silicon-based solar cells

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P12 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[17p-P12-2] Optimization of texturing process for mono-crystalline silicon solar cells using ClF3 plasmaless dry etching (Ⅱ)

Yoshinori Miyasaka1, Motoki Ogasawara1, Ryosuke Watanabe1, Yoji Saito1 (Seikei Univ.1)

Keywords:太陽電池,texturing,dry etching