[17p-P2-1~49] 8 Plasma Electronics

[17p-P2-12] Optimization of extraction structure and plasma diagnostics of a 14GHz ECR ion source

^○(B)Ryo Tamura¹, Tomoya Ichikawa¹, Toshiro Kasuya¹, Takahiro Kenmotu¹, Syuichi Maeno², Tomoaki Nishida¹, Masaki Nishiura³, Hitoshi Yamaoka⁴ (Doshisya Univ.¹, Novelion Co Ltd.², NIFS³, RIKEN⁴)

Keywords:14GHzECRイオン源