The 74th JSAP Autumn Meeting,2013

Presentation information

Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

[17p-P2-1~49] 8 Plasma Electronics

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[17p-P2-21] Chemical bonding in SiNx films grown by VHF-PECVD

Shin-ichi Kobayashi1 (Tokyo Polytechnic Univ.1)

Keywords:窒化シリコン膜,化学的気相成長,プラズマ成膜