Chemical bonding in SiNx films grown by VHF-PECVD

Presentation information

Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

^○Shin-ichi Kobayashi¹ (Tokyo Polytechnic Univ.¹)

Keywords:窒化シリコン膜,化学的気相成長,プラズマ成膜