Effect upon the film morphology due to distance between the ECR plasma excitation antenna and the deposition target surface

Presentation information

Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

^○Camille Faith Romero¹, Masaru Yamanaka¹, Motoi Wada¹ (Doshisha Univ.¹)

Keywords:plasma deposition