The 74th JSAP Autumn Meeting,2013

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Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

[17p-P2-1~49] 8 Plasma Electronics

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[17p-P2-26] Deposition of Cr-Al-N-O thin film by RF Unbalanced Magnetron Sputtering

○Manabu Fukugauchi1, Makoto Asano1, Yasuhiro Miki1, Makoto Hirai2, Kyohei Suguyama2 (Nara Prefecture Institute of Industrial Development1, Nara National College of Technology2)

Keywords:UBMS,RFスパッタリング