1:30 PM - 3:30 PM
[17p-P2-28] DLC formation by using dielectric barrier discharge plasma
Keywords:プラズマCVD
Poster presentation
08. Plasma Electronics » 8 Plasma Electronics(poster)
Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)
1:30 PM - 3:30 PM
Keywords:プラズマCVD