The 74th JSAP Autumn Meeting,2013

Presentation information

Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

[17p-P2-1~49] 8 Plasma Electronics

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[17p-P2-30] Effect of etching mask on Al-rich AlGaAs dry etching for photonic crystal fabrication

Yuji Togano1, Yuta Kitabayashi1, Masahiko Kondow1 (Osaka Univ.1)

Keywords:ドライエッチング