Effect of etching mask on Al-rich AlGaAs dry etching for photonic crystal fabrication

Presentation information

Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

^○Yuji Togano¹, Yuta Kitabayashi¹, Masahiko Kondow¹ (Osaka Univ.¹)

Keywords:ドライエッチング