The 74th JSAP Autumn Meeting,2013

Presentation information

Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

[17p-P2-1~49] 8 Plasma Electronics

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[17p-P2-33] Characterization of Plasma Distribution in High-Rate Etching of Si by High-Pressure Microwave Hydrogen Plasma

Takahiro Yamada1,3, Kosuke Yamada1, Takahiro Adachi2, Hiromasa Ohmi1,3, Hiroaki Kakiuchi1,3, Kiyoshi Yasutake1,3 (Osaka Univ.1, Osaka Univ.2, JST CREST3)

Keywords:シラン,エッチング,太陽電池