[17p-P2-1~49] 8 Plasma Electronics

[17p-P2-33] Characterization of Plasma Distribution in High-Rate Etching of Si by High-Pressure Microwave Hydrogen Plasma

^○Takahiro Yamada^1,3, Kosuke Yamada¹, Takahiro Adachi², Hiromasa Ohmi^1,3, Hiroaki Kakiuchi^1,3, Kiyoshi Yasutake^1,3 (Osaka Univ.¹, Osaka Univ.², JST CREST³)

Keywords:シラン,エッチング,太陽電池