The 74th JSAP Autumn Meeting,2013

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Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

[17p-P2-1~49] 8 Plasma Electronics

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[17p-P2-34] Etching characteristics of organic polymers in inductively coupled fluorocarbon plasmas

○(M1)Shunsuke Matsue1, Kazuo Takahashi1 (Kyoto Inst.1)

Keywords:誘導結合,Etching