Optical Properties of Microstructured ITO Films Deposited by Glancing-angle Sputtering

Presentation information

Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

^○Yasushi Inoue¹, Taku Ishii¹, Yusuke Ohta¹, Masataka Kato¹, Takashige Masukawa¹, Osamu Takai² (Chiba Inst. Technol.¹, Kanto Gakuin Univ.²)

Keywords:斜め堆積,反応性スパッタリング,微絨毛構造