[17p-P2-1~49] 8 Plasma Electronics

[17p-P2-5] Infrared Spectroscopy of Substrate Bias Effect on Deposition Process of Amorphous Canrbon Film Using Benzene as a Source Molecule

Yujiro Taniguchi¹, Shohei Yagi¹, ^○Masanori Shinohara¹, Yoshinobu Matsuda¹, Hiroshi Fujiyama¹ (Nagasaki Univ.¹)

Keywords:赤外分光,ベンゼン,アモルファス状炭素膜