The 74th JSAP Autumn Meeting,2013

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Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

[17p-P2-1~49] 8 Plasma Electronics

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[17p-P2-8] Measurements of current-voltage characteristics of metals in capacitive coupled Ar rf Plasmas Ⅶ

○Takashi Kubo1 (Hiroshima Kokusai Gakuin Univ.1)

Keywords:probe,surface,plasma