Measurement and evaluation of the ion bombardment energy in SiH<sub>4</sub>/H<sub>2</sub> remote plasmas with the balanced power feeding

Presentation information

Poster presentation

08. Plasma Electronics » 8 Plasma Electronics(poster)

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P2 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

^○Yuki Takishita¹, Hiroshi Muta¹, Shizuma Kuribayashi¹, Satoshi Nishida¹ (Gifu Univ.¹)

Keywords:イオン衝撃エネルギー,バラン給電,リモートプラズマ