[17p-P5-1~7] 12.10 Nanobiotechnology

[17p-P5-7] Thin Si Film MEMS Cantilever Uniformly Crystallized with Ni Ferritin Spuramolecules

Takashi Tomikawa¹, ^○Shinya Kumagai^1,3, Ichiro Yamashita^2,3, Yukiharu Uraoka^2,3, Minoru Sasaki^2,3 (Toyota Technol. Inst.¹, Naist², CREST JST³)

Keywords:フェリチン,カンチレバー,Si薄膜