The 74th JSAP Autumn Meeting,2013

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Poster presentation

15. Crystal Engineering » 15.1 Bulk crystal growth

[17p-P6-1~3] 15.1 Bulk crystal growth

Tue. Sep 17, 2013 1:30 PM - 3:30 PM P6 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[17p-P6-1] MCZ Silicon Crystal Growth with Ultra Low Carbon Concentration

○Yuta Nagai1, Satoko Nakagawa1, Kazuhiko Kashima1 (GWJ1)

Keywords:シリコン,引上げ,炭素