[17p-P8-1~7] 15.5 IV-group crystals and IV-IV-group mixed crystals

[17p-P8-2] Solid Phase Epitaxial Growth of Cap-Si/SiGe/Si(110) Heterostructure, and Evaluation of Interface State Density and Mobility of SiO2/ Cap-Si/SiGe/Si(110)

^○Tomoyuki Obata¹, Keisuke Arimoto¹, Junji Yamanaka¹, Kiyokazu Nakagawa¹, Yusuke Hoshi², Kentaro Sawano², Yasuhiro Shiraki² (CCST Univ. of Yamanashi¹, ARL Tokyo City Univ.²)

Keywords:界面準位密度