[18a-A14-1~11] 4.5 THz technology

▲ [18a-A14-7] Improvement of Microbolometer Responsivity by Miniaturization

^○(P)Ajay Tiwari¹, Hiroaki Satoh¹, Makoto Aoki², Masanori Takeda², Norihisa Norihisa², Hiroshi Inokawa¹ (Res. Inst. of Electron., Shizuoka Univ.¹, Grad. School of Eng., Shizuoka Univ.²)

Keywords:Micrbolometer,Terahertz,Electro-Thermal Simulation