Large Area Transfer of Silicon Films with Midair Cavity Using Meniscus Force

Presentation information

Oral presentation

16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

Wed. Sep 18, 2013 9:15 AM - 12:00 PM A4 (TC1 2F-216)

10:00 AM - 10:15 AM

^○Shogo Nakamura¹, Kohei Sakaike¹, Muneki Akazawa¹, Takashi Fukunaga¹, Shohei Hayashi¹, Seiichiro Higashi¹ (Hiroshima Univ.¹)

Keywords:中空構造シリコン膜,メニスカス力,転写