The 74th JSAP Autumn Meeting,2013

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Oral presentation

16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

[18a-A4-1~9] 16.2 Processing technologies and devices

Wed. Sep 18, 2013 9:15 AM - 12:00 PM A4 (TC1 2F-216)

10:15 AM - 10:30 AM

[18a-A4-4] Local Area Transfer of Tiny Si Films with Midair Cavity Using Meniscus Force

○Takashi Fukunaga1, Kohei Sakaike1, Shogo Nakamura1, Muneki Akazawa1, Seiichiro Higashi1 (Graduate School of Advanced Sciences of Matter, Hiroshima Univ.1)

Keywords:中空構造Si膜