[18a-A4-1~9] 16.2 Processing technologies and devices

[18a-A4-5] Synthesis and characterization of Si clathrate thin films

^○(PC)Fumitaka Ohashi¹, Yoshi Iwai¹, Tomoya Sugiyama¹, Akihiro Noguchi¹, Kazuki Nagai¹, Masashi Hattori¹, Takuya Ogura¹, Roto Himeno¹, Takayuki Ban¹, Tetsuji Kume¹, Shigeo Sasaki¹, Shuichi Nonomura¹ (Gifu Univ.¹)

Keywords:Si,clathrate,薄膜