The 74th JSAP Autumn Meeting,2013

Presentation information

Print

Oral presentation

16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

[18a-A4-1~9] 16.2 Processing technologies and devices

Wed. Sep 18, 2013 9:15 AM - 12:00 PM A4 (TC1 2F-216)

11:45 AM - 12:00 PM

[18a-A4-9] Controlling of VO2 surface state by sputtering deposition and lamp anneal

○Kazutaka Nishikawa1, Yoshihiro Kishida1, Yasuhiko Takeda1 (TCRDL1)

Keywords:VO2,スパッタ,表面