The 74th JSAP Autumn Meeting,2013

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Oral presentation

17. Nanocarbon Technology » 17.2 Structural control and process

[18a-B2-1~8] 17.2 Structural control and process

Wed. Sep 18, 2013 9:00 AM - 11:15 AM B2 (TC2 1F-102)

11:00 AM - 11:15 AM

[18a-B2-8] Formation of δ-doped Diamondlike Carbon Films by Photoemission-Assisted Plasma-Enhanced CVD

○Susumu Takabayashi1, Meng Yang2, Hiroyuki Hayashi2, Radek Ješko2, Shuichi Ogawa2, Taiichi Otsuji1, Yuji Takakuwa2 (RIEC, Tohoku Univ.1, IMRAM, Tohoku Univ.2)

Keywords:diamondlike carbon