The 74th JSAP Autumn Meeting,2013

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Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[18a-B3-1~9] 15.6 IV-group-based compounds

Wed. Sep 18, 2013 9:00 AM - 11:30 AM B3 (TC2 1F-105)

11:00 AM - 11:15 AM

[18a-B3-8] Non destructive inspection of dislocations in SiC wafer by mirror projection electron microscopy

○Toshiyuki Isshiki1, Masaki Hasegawa2 (Kyoto Inst. Tech.1, Hitachi, Cent. Res. Lab.2)

Keywords:欠陥評価,ミラー電子顕微鏡,非破壊非接触