Dissociation paths caused by electron collisions for fluoromethanes

Presentation information

Oral presentation

08. Plasma Electronics » 8.4 Plasma etching

Wed. Sep 18, 2013 9:30 AM - 11:45 AM C2 (TC3 1F-102)

9:30 AM - 9:45 AM

^○Toshio Hayashi¹, Kenji Ishikawa¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya University¹)

Keywords:Dissociation paths,fluoromethanes,high energy excited states