[18a-C7-1~10] 6.4 薄膜新材料

▲ [18a-C7-5] Deposition of Highly Coordinated MgO Films by CVD Operated Under Atmosphere

^○(M2)David Alonso Pineda Marulanda¹, Keiji Komatsu¹, Shigeo Ohshio¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. of Tech.¹)

キーワード：Magnesium Oxide,Higly Coordinated Films,Chemical Vapor Deposition Operated Under Atmosphere