Deposition of Highly Coordinated MgO Films by CVD Operated Under Atmosphere

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

Wed. Sep 18, 2013 9:00 AM - 12:30 PM C7 (TC3 1F-117)

10:15 AM - 10:30 AM

^○(M2)David Alonso Pineda Marulanda¹, Keiji Komatsu¹, Shigeo Ohshio¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. of Tech.¹)

Keywords:Magnesium Oxide,Higly Coordinated Films,Chemical Vapor Deposition Operated Under Atmosphere