The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18a-D1-1~10] 6.2 Carbon-based thin films

Wed. Sep 18, 2013 9:15 AM - 12:00 PM D1 (MK 1F-101)

9:15 AM - 9:30 AM

[18a-D1-1] High rate homoepitaxial growth of Diamond (111) by MPCVD using spherical cavity

○Ryusuke Morimoto1, Shunsuke Watanabe1, Junya Yaita1, Norio Tokuda1,2,3, Masahiko Ogura2,3, Satoshi Yamasaki2,3, Takao Inokuma1 (Grad. School of Natural Sci. & Tech. Kanazawa Univ.1, AIST2, CREST(JST)3)

Keywords:ダイヤモンド,CVD,成長