[18a-D1-1~10] 6.2 カーボン系薄膜

[18a-D1-1] High rate homoepitaxial growth of Diamond (111) by MPCVD using spherical cavity

^○Ryusuke Morimoto¹, Shunsuke Watanabe¹, Junya Yaita¹, Norio Tokuda^1,2,3, Masahiko Ogura^2,3, Satoshi Yamasaki^2,3, Takao Inokuma¹ (Grad. School of Natural Sci. & Tech. Kanazawa Univ.¹, AIST², CREST(JST)³)

キーワード：ダイヤモンド,CVD,成長